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| Microsystems Lab | Research | Services | Course Material | Personnel | Publications | Contact | |
microsystems laboratory |
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TeachingFundamentals of Micromachining (lecture and lab) ECE 5221/6221, cross listed in ME, MSE, BioEng · Material online Microsensors and Actuators (lecture and lab) ECE 6231 (as of Fall 2004), cross listing in preparation Microsystems certificate course development (B. Gale, I. Harvey, F. Solzbacher) Potential special topics: Design and Simulation of MEMS Packaging and Assembly of MEMS Harsh Environment MEMS · Course syllabus (spring/fall, course/lab) |
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